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Author del Corro, P. G.; Imboden, M.; Bishop, D. J.; Pastoriza, H.
Title Comb Drive Designs With Minimized Levitation Type Journal Article
Year 2016 Publication Journal of Microelectromechanical Systems Abbreviated Journal Journal of Microelectromechanical Systems
Volume 25 Issue 6 Pages (down) 1025-1032
Keywords driver circuits; electrostatic actuators; microfabrication; Mems; capacitive comb drive design; comb finger polarity; comb geometry optimization; control electrode; distance 3.6 mum; electric field; electrostatic actuation; levitation effect elimination; polyMUMP technology; vertical force suppression; voltage 80 V; Capacitance; Force; Levitation; Micromechanical devices; Mobile communication; Springs; Substrates; Mems; actuators; comb drives; levitation
Abstract This paper presents two capacitive comb drive

designs for electrostatic actuation of MEMS with the aim to

eliminate the levitation effect often observed in such systems.

By placing a shield over the comb drive fingers, it is possible

to balance the electric field and suppress vertical forces while

maintaining the desired lateral motion. By optimizing the comb

geometry, we demonstrate that our approach is able to reduce the

levitation by an order of magnitude and unwanted coupling of

motion from out-of-plane to in-plane by a factor of 7 compared

with standard comb architectures fabricated using PolyMUMPs

technology, without the need of alternating comb finger polarities

or additional control electrodes. Levitation was reduced to

160 nm, for 3.6-µm lateral displacement at a driving voltage

of 80 V.
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Corporate Author Thesis
Publisher Place of Publication Editor
Language Summary Language Original Title
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 1057-7157 ISBN Medium
Area Expedition Conference
Notes Approved no
Call Number BT @ hernan @ Serial 744
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