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Author del Corro, P. G.; Imboden, M.; Bishop, D. J.; Pastoriza, H. url  doi
  Title Comb Drive Designs With Minimized Levitation Type Journal Article
  Year 2016 Publication Journal of Microelectromechanical Systems Abbreviated Journal Journal of Microelectromechanical Systems  
  Volume 25 Issue 6 Pages 1025-1032  
  Keywords driver circuits; electrostatic actuators; microfabrication; Mems; capacitive comb drive design; comb finger polarity; comb geometry optimization; control electrode; distance 3.6 mum; electric field; electrostatic actuation; levitation effect elimination; polyMUMP technology; vertical force suppression; voltage 80 V; Capacitance; Force; Levitation; Micromechanical devices; Mobile communication; Springs; Substrates; Mems; actuators; comb drives; levitation  
  Abstract This paper presents two capacitive comb drive

designs for electrostatic actuation of MEMS with the aim to

eliminate the levitation effect often observed in such systems.

By placing a shield over the comb drive fingers, it is possible

to balance the electric field and suppress vertical forces while

maintaining the desired lateral motion. By optimizing the comb

geometry, we demonstrate that our approach is able to reduce the

levitation by an order of magnitude and unwanted coupling of

motion from out-of-plane to in-plane by a factor of 7 compared

with standard comb architectures fabricated using PolyMUMPs

technology, without the need of alternating comb finger polarities

or additional control electrodes. Levitation was reduced to

160 nm, for 3.6-µm lateral displacement at a driving voltage

of 80 V.
  Corporate Author Thesis (up)  
  Publisher Place of Publication Editor  
  Language Summary Language Original Title  
  Series Editor Series Title Abbreviated Series Title  
  Series Volume Series Issue Edition  
  ISSN 1057-7157 ISBN Medium  
  Area Expedition Conference  
  Notes Approved no  
  Call Number BT @ hernan @ Serial 744  
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