|   | 
Details
   web
Records
Author (up) del Corro, P. G.; Imboden, M.; Bishop, D. J.; Pastoriza, H.
Title Comb Drive Designs With Minimized Levitation Type Journal Article
Year 2016 Publication Journal of Microelectromechanical Systems Abbreviated Journal Journal of Microelectromechanical Systems
Volume 25 Issue 6 Pages 1025-1032
Keywords driver circuits; electrostatic actuators; microfabrication; Mems; capacitive comb drive design; comb finger polarity; comb geometry optimization; control electrode; distance 3.6 mum; electric field; electrostatic actuation; levitation effect elimination; polyMUMP technology; vertical force suppression; voltage 80 V; Capacitance; Force; Levitation; Micromechanical devices; Mobile communication; Springs; Substrates; Mems; actuators; comb drives; levitation
Abstract This paper presents two capacitive comb drive

designs for electrostatic actuation of MEMS with the aim to

eliminate the levitation effect often observed in such systems.

By placing a shield over the comb drive fingers, it is possible

to balance the electric field and suppress vertical forces while

maintaining the desired lateral motion. By optimizing the comb

geometry, we demonstrate that our approach is able to reduce the

levitation by an order of magnitude and unwanted coupling of

motion from out-of-plane to in-plane by a factor of 7 compared

with standard comb architectures fabricated using PolyMUMPs

technology, without the need of alternating comb finger polarities

or additional control electrodes. Levitation was reduced to

160 nm, for 3.6-µm lateral displacement at a driving voltage

of 80 V.
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Summary Language Original Title
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 1057-7157 ISBN Medium
Area Expedition Conference
Notes Approved no
Call Number BT @ hernan @ Serial 744
Permanent link to this record
 

 
Author (up) del Corro, P.G.; Imboden, M.; Pérez, D.J.; Bishop, D.J.; Pastoriza, H.
Title Single ended capacitive self-sensing system for comb drives driven XY nanopositioners Type Journal Article
Year 2018 Publication Sensors and Actuators A: Physical Abbreviated Journal
Volume 271 Issue Pages 409-417
Keywords Comb drives; Nanopositioners; Capacitive detection
Abstract This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5aF/Hz, for a sensing voltage Vsen=3Vrms and fsen=150kHz, which is equivalent to 1.1nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners.
Address
Corporate Author Thesis
Publisher Place of Publication Editor
Language Summary Language Original Title
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 0924-4247 ISBN Medium
Area Expedition Conference
Notes Approved no
Call Number BT @ hernan @ Serial 763
Permanent link to this record
 

 
Author (up) Imboden, M.; Han, H.; Stark, T.; Lowell, E.; Chang, J.; Pardo, F.; Bolle, C.; del Corro, P.G.; Bishop, D.J.
Title Building a Fab on a Chip Type Journal Article
Year 2014 Publication Nanoscale Abbreviated Journal
Volume 6 Issue Pages 5049-5062
Keywords
Abstract Semiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab onto a single silicon chip. We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one typically finds in a fab, and integrating all the components together. We argue that the technology now exists to allow one to build a Fab on a Chip.
Address
Corporate Author Thesis
Publisher The Royal Society of Chemistry Place of Publication Editor
Language Summary Language Original Title
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 2040-3364 ISBN Medium
Area Expedition Conference
Notes Approved no
Call Number BT @ hernan @ Serial 679
Permanent link to this record