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Author del Corro, P.G.; Imboden, M.; Pérez, D.J.; Bishop, D.J.; Pastoriza, H. url  doi
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  Title Single ended capacitive self-sensing system for comb drives driven XY nanopositioners Type Journal Article
  Year 2018 Publication Sensors and Actuators A: Physical Abbreviated Journal (up)  
  Volume 271 Issue Pages 409-417  
  Keywords Comb drives; Nanopositioners; Capacitive detection  
  Abstract This paper presents the implementation of a system to capacitively self-sense the position of a comb drive based MEMS XY nanopositioner from a single common node. The nanopositioner was fabricated using the multi-users PolyMUMPs process, on which comb capacitors fringe fields are large and out of plane forces cause considerable deflection. An extensive analysis of the comb-drive capacitance including the levitation effects and its correlation to the measurements is presented. Each axis is independently measured using frequency division multiplexing (FDM) techniques. Taking advantage of the symmetry of the nanopositioner itself, the sensitivity is doubled while eliminating the intrinsic capacitance of the device. The electrical measured noise is 2.5aF/Hz, for a sensing voltage Vsen=3Vrms and fsen=150kHz, which is equivalent to 1.1nm/Hz lateral displacement noise. This scheme can also be extended to N-degree of freedom nanopositioners.  
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  Series Volume Series Issue Edition  
  ISSN 0924-4247 ISBN Medium  
  Area Expedition Conference  
  Notes Approved no  
  Call Number BT @ hernan @ Serial 763  
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