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Author Imboden, M.; Han, H.; Stark, T.; Lowell, E.; Chang, J.; Pardo, F.; Bolle, C.; del Corro, P.G.; Bishop, D.J.
Title Building a Fab on a Chip Type Journal Article
Year 2014 Publication Nanoscale Abbreviated Journal
Volume 6 Issue Pages 5049-5062
Keywords
Abstract Semiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab onto a single silicon chip. We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one typically finds in a fab, and integrating all the components together. We argue that the technology now exists to allow one to build a Fab on a Chip.
Address
Corporate Author Thesis
Publisher The Royal Society of Chemistry Place of Publication Editor
Language Summary Language Original Title
Series Editor Series Title Abbreviated Series Title
Series Volume Series Issue Edition
ISSN 2040-3364 ISBN Medium
Area Expedition Conference
Notes Approved (up) no
Call Number BT @ hernan @ Serial 679
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