| Record |
| Author |
Hofer, J.A.; Bengio, S.; Rozas, G.; Pérez, P.D.; Sirena, M.; Suárez, S.; Haberkorn, N. |
| Title |
Compositional effects on the electrical properties of extremely disordered molybdenum oxynitrides thin films |
Type |
Journal Article |
| Year |
2020 |
Publication |
Materials Chemistry and Physics |
Abbreviated Journal |
Mater. Chem. Phys. |
| Volume |
242 |
Issue |
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Pages |
122075 |
| Keywords |
Molybdenum; Oxynitrides; Thin films; Sputtering; Electrical transport |
| Abstract |
Molybdenum oxynitride (MoNxOy) thin films were grown by reactive sputtering on Si (100) substrates at room temperature. The partial pressure of Ar was fixed at 90%, and the remaining 10% was adjusted with mixtures N2:O2 (varying from pure N2 to pure O2). The electrical properties of the films depend on the chemical composition. Thin films grown using mixtures up to 2% O2 have γ-Mo2N phase and display superconductivity. The superconducting critical temperature Tc reduces from ∼6.8 K to below 3.0 K as the oxygen increases. On the other hand, the films are mostly amorphous for gas mixtures above 2% O2. The electrical conductivity shows a semiconductor-like behavior well described by variable-range hopping conduction. The analysis of the optical properties reveals that the samples do not have a defined semiconductor bandgap, indicating that the high structural disorder produces electron excitation for a wide range of energies. |
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| ISSN |
0254-0584 |
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BT @ pedrazp @ |
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860 |
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