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Author (up) del Corro, P. G.; Imboden, M.; Bishop, D. J.; Pastoriza, H. url  doi
openurl 
  Title Comb Drive Designs With Minimized Levitation Type Journal Article
  Year 2016 Publication Journal of Microelectromechanical Systems Abbreviated Journal Journal of Microelectromechanical Systems  
  Volume 25 Issue 6 Pages 1025-1032  
  Keywords driver circuits; electrostatic actuators; microfabrication; Mems; capacitive comb drive design; comb finger polarity; comb geometry optimization; control electrode; distance 3.6 mum; electric field; electrostatic actuation; levitation effect elimination; polyMUMP technology; vertical force suppression; voltage 80 V; Capacitance; Force; Levitation; Micromechanical devices; Mobile communication; Springs; Substrates; Mems; actuators; comb drives; levitation  
  Abstract This paper presents two capacitive comb drive

designs for electrostatic actuation of MEMS with the aim to

eliminate the levitation effect often observed in such systems.

By placing a shield over the comb drive fingers, it is possible

to balance the electric field and suppress vertical forces while

maintaining the desired lateral motion. By optimizing the comb

geometry, we demonstrate that our approach is able to reduce the

levitation by an order of magnitude and unwanted coupling of

motion from out-of-plane to in-plane by a factor of 7 compared

with standard comb architectures fabricated using PolyMUMPs

technology, without the need of alternating comb finger polarities

or additional control electrodes. Levitation was reduced to

160 nm, for 3.6-µm lateral displacement at a driving voltage

of 80 V.
 
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  ISSN 1057-7157 ISBN Medium  
  Area Expedition Conference  
  Notes Approved no  
  Call Number BT @ hernan @ Serial 744  
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Author (up) Wuyts, B.; Gao, Z.X.; Libbrecht, S.; Maenhoudt, M.; Osquiguil, E.; Bruynseraede, Y. url  openurl
  Title Growth of particle-free YBa2Cu3O7 films by off-axis sputtering Type Journal Article
  Year 1992 Publication Physica C: Superconductivity and its applications Abbreviated Journal Phys C Supercond Appl  
  Volume 203 Issue 3-4 Pages 235-239  
  Keywords Copper oxides; Film growth; Film preparation; Magnetrons; Particles (particulate matter); Sputter deposition; Substrates; Superconductivity; Thin films; Yttrium compounds; Critical current density; Off axis single target magnetron sputtering; Particle free superconducting films; Yttrium barium copper oxides; Superconducting films  
  Abstract The preparation of good YBa2Cu3O7 thin films is often hindered by the production of non-stoichiometric particles which degrade the superconducting properties of the layer. A systematic study of films prepared by off-axis single target magnetron sputtering shows that the presence of copper-rich particles dramatically decreases the critical current density but does not affect the critical temperature. The formation of these particles can be avoided by carefully adjusting the position of the substrate with respect to the target. Films without off-stoichiometric particles have excellent superconducting properties.  
  Address Laboratorium voor Vaste Stof-Fysika en Magnetisme, Katholieke Universiteit Leuven, Celestijnenlaan 200 D, B-3001 Leuven, Belgium  
  Corporate Author Thesis  
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  Language Summary Language Original Title  
  Series Editor Series Title Abbreviated Series Title  
  Series Volume Series Issue Edition  
  ISSN 09214534 (ISSN) ISBN Medium  
  Area Expedition Conference  
  Notes Cited By (since 1996): 10; Export Date: 17 April 2009; Source: Scopus; CODEN: PHYCE; Language of Original Document: English; Correspondence Address: Wuyts, B.; Laboratorium voor Vaste Stof-Fysika en Magnetisme; Katholieke Universiteit Leuven; Celestijnenlaan 200 D B-3001 Leuven, Belgium Approved no  
  Call Number BT @ osquigui @ Serial 403  
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