toggle visibility Search & Display Options

Select All    Deselect All
 |   | 
Details
   print
  Record Links
Author Ogando, K.; La Forgia, N.; Zárate, J.J.; Pastoriza, H. url  doi
openurl 
  Title Design and characterization of a fully compliant out-of-plane thermal actuator Type Journal Article
  Year 2012 Publication Sensors and Actuators A: Physical Abbreviated Journal  
  Volume 183 Issue Pages 95-100  
  Keywords Surface micro-machining; Thermal actuators  
  Abstract This paper presents the design and characterization of an out-of-plane thermal actuator. The design optimizes the vertical displacement by concentrating elastic deformations in localized hinges allowing a full thermal expansion of the actuator arms. Heating is provided by Joule dissipation in the actuator itself.

A testing device was fabricated using the Memscap PolyMUMPs process. Characterization of the sensor was performed by white light optical profilometry for varying electric biasing and different atmospheres.

The presented design has the advantage that the moving direction of the actuator can be determined by the relative location of the hinges.
 
  Address  
  Corporate Author Thesis  
  Publisher Place of Publication Editor  
  Language Summary Language Original Title  
  Series Editor Series Title Abbreviated Series Title  
  Series Volume Series Issue Edition  
  ISSN 0924-4247 ISBN Medium  
  Area Expedition Conference  
  Notes Approved no  
  Call Number BT @ hernan @ Serial 646  
Permanent link to this record
Select All    Deselect All
 |   | 
Details
   print

Save Citations:
Export Records: