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Antonio, D.; Pastoriza, H. |
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Title |
Nonlinear Dynamics of a Micromechanical Torsional Resonator: Analytical Model and Experiments |
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Journal Article |
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Year |
2009 |
Publication |
Journal of Microelectromechanical Systems |
Abbreviated Journal |
J. Microelectromechanical Sys. |
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18 |
Issue |
6 |
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1396-1400 |
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Abstract |
Mechanical microoscillators have been valuable tools for magnetic measurements of microscopic samples. This paper presents an analytical model for the dynamics of an electrostatically actuated torsional oscillator and validates it experimentally. While, at low excitations, the system is well described by a damped linear oscillator, at higher oscillation amplitudes, a nonlinear regime is observed. Nonlinearity is originated exclusively by the electrostatic driving and detection and can be tuned by modifying the excitation or detection bias voltages. The parameters of the analytical model are obtained from the device dimensions and material properties. No empirical or fitting parameters are needed except for the quality factor, which is extracted from the linear resonance curve. The proposed model can be a valuable and straightforward tool for the design and analysis of many other similar devices based on electrostatically actuated mechanical resonators. |
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BT @ hernan @ |
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586 |
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Author |
del Corro, P. G.; Imboden, M.; Bishop, D. J.; Pastoriza, H. |
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Title |
Comb Drive Designs With Minimized Levitation |
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Journal Article |
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Year |
2016 |
Publication |
Journal of Microelectromechanical Systems |
Abbreviated Journal |
Journal of Microelectromechanical Systems |
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Volume |
25 |
Issue |
6 |
Pages |
1025-1032 |
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Keywords |
driver circuits; electrostatic actuators; microfabrication; Mems; capacitive comb drive design; comb finger polarity; comb geometry optimization; control electrode; distance 3.6 mum; electric field; electrostatic actuation; levitation effect elimination; polyMUMP technology; vertical force suppression; voltage 80 V; Capacitance; Force; Levitation; Micromechanical devices; Mobile communication; Springs; Substrates; Mems; actuators; comb drives; levitation |
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Abstract |
This paper presents two capacitive comb drive
designs for electrostatic actuation of MEMS with the aim to
eliminate the levitation effect often observed in such systems.
By placing a shield over the comb drive fingers, it is possible
to balance the electric field and suppress vertical forces while
maintaining the desired lateral motion. By optimizing the comb
geometry, we demonstrate that our approach is able to reduce the
levitation by an order of magnitude and unwanted coupling of
motion from out-of-plane to in-plane by a factor of 7 compared
with standard comb architectures fabricated using PolyMUMPs
technology, without the need of alternating comb finger polarities
or additional control electrodes. Levitation was reduced to
160 nm, for 3.6-µm lateral displacement at a driving voltage
of 80 V. |
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1057-7157 |
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BT @ hernan @ |
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744 |
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