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Author Imboden, M.; Han, H.; Stark, T.; Lowell, E.; Chang, J.; Pardo, F.; Bolle, C.; del Corro, P.G.; Bishop, D.J. doi  openurl
  Title Building a Fab on a Chip Type Journal Article
  Year 2014 Publication Nanoscale Abbreviated Journal  
  Volume 6 Issue Pages 5049-5062  
  Abstract Semiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab onto a single silicon chip. We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one typically finds in a fab, and integrating all the components together. We argue that the technology now exists to allow one to build a Fab on a Chip.  
  Corporate Author Thesis  
  Publisher The Royal Society of Chemistry Place of Publication Editor  
  Language Summary Language Original Title  
  Series Editor Series Title Abbreviated Series Title  
  Series Volume Series Issue Edition  
  ISSN 2040-3364 ISBN Medium (up)  
  Area Expedition Conference  
  Notes Approved no  
  Call Number BT @ hernan @ Serial 679  
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