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| Author | Imboden, M.; Han, H.; Stark, T.; Lowell, E.; Chang, J.; Pardo, F.; Bolle, C.; del Corro, P.G.; Bishop, D.J. | ||||
| Title | Building a Fab on a Chip | Type | Journal Article | ||
| Year | 2014 | Publication | Nanoscale | Abbreviated Journal | |
| Volume | 6 | Issue | Pages | 5049-5062 | |
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| Abstract | Semiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab onto a single silicon chip. We demonstrate a path forward where, for certain applications, especially at the nanometer scale, one can consider using a single chip approach for building devices with significant potential cost savings. In our approach, we build micro versions of the macro machines one typically finds in a fab, and integrating all the components together. We argue that the technology now exists to allow one to build a Fab on a Chip. | ||||
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| Publisher | The Royal Society of Chemistry | Place of Publication  |
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| Language | Summary Language | Original Title | |||
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| Series Volume | Series Issue | Edition | |||
| ISSN | 2040-3364 | ISBN | Medium | ||
| Area | Expedition | Conference | |||
| Notes | Approved | no | |||
| Call Number | BT @ hernan @ | Serial | 679 | ||
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