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Author (up) Pardo, F.; Burmeister, G.; Guimpel, J. openurl 
  Title Substrate heater design for film deposition in oxidizing atmosphere Type Journal Article
  Year 1996 Publication REVIEW OF SCIENTIFIC INSTRUMENTS Abbreviated Journal  
  Volume 67 Issue 6 Pages 2370-2371  
  Keywords  
  Abstract A simple substrate heater for oxide film deposition is presented. Its main features are (a) good thermal contact between temperature sensor, heater, and substrate and (b) compatibility with oxidizing atmosphere at high temperatures. The system shows a good response for the deposition conditions necessary in high-T-c cuprate materials. (C) 1996 American Institute of Physics.  
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  Series Volume Series Issue Edition  
  ISSN 0034-6748 ISBN Medium  
  Area Expedition Conference  
  Notes ISI:A1996UR22200052 Approved no  
  Call Number BT @ hernan @ Serial 188  
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