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Author (up) Wuyts, B.; Gao, Z.X.; Libbrecht, S.; Maenhoudt, M.; Osquiguil, E.; Bruynseraede, Y.
Title Growth of particle-free YBa2Cu3O7 films by off-axis sputtering Type Journal Article
Year 1992 Publication Physica C: Superconductivity and its applications Abbreviated Journal Phys C Supercond Appl
Volume 203 Issue 3-4 Pages 235-239
Keywords Copper oxides; Film growth; Film preparation; Magnetrons; Particles (particulate matter); Sputter deposition; Substrates; Superconductivity; Thin films; Yttrium compounds; Critical current density; Off axis single target magnetron sputtering; Particle free superconducting films; Yttrium barium copper oxides; Superconducting films
Abstract The preparation of good YBa2Cu3O7 thin films is often hindered by the production of non-stoichiometric particles which degrade the superconducting properties of the layer. A systematic study of films prepared by off-axis single target magnetron sputtering shows that the presence of copper-rich particles dramatically decreases the critical current density but does not affect the critical temperature. The formation of these particles can be avoided by carefully adjusting the position of the substrate with respect to the target. Films without off-stoichiometric particles have excellent superconducting properties.
Address Laboratorium voor Vaste Stof-Fysika en Magnetisme, Katholieke Universiteit Leuven, Celestijnenlaan 200 D, B-3001 Leuven, Belgium
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ISSN 09214534 (ISSN) ISBN Medium
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Notes Cited By (since 1996): 10; Export Date: 17 April 2009; Source: Scopus; CODEN: PHYCE; Language of Original Document: English; Correspondence Address: Wuyts, B.; Laboratorium voor Vaste Stof-Fysika en Magnetisme; Katholieke Universiteit Leuven; Celestijnenlaan 200 D B-3001 Leuven, Belgium Approved no
Call Number BT @ osquigui @ Serial 403
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