del Corro, P. G., M. Imboden, D. J. Bishop, and H. Pastoriza. "Comb Drive Designs With Minimized Levitation." Journal of Microelectromechanical Systems 25, no. 6 (2016): 1025–1032.
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del Corro, P. G., M. Imboden, D. J. Pérez, D. J. Bishop, and H. Pastoriza. "Single ended capacitive self-sensing system for comb drives driven XY nanopositioners." Sensors and Actuators A: Physical 271 (2018): 409–417.
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