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Antonio, D., M. I. Dolz, and H. Pastoriza. "Micromechanical magnetometer using an all-silicon nonlinear torsional resonator." Applied Physics Letters 95, no. 13 (2009): 133505–3.
Abstract: In this work, a micromagnetometer employing a nonlinear torsional resonator with a high quality factor Q is presented experimentally. Oscillatory rotation of a conducting plate in the sensed magnetic field H induces eddy currents that dissipate energy. Due to the nonlinear response of the oscillator, the resulting mechanical damping originates frequency shifts in the resonance curve that depend on H. Nonlinearity results from the electrostatic detection, which introduces high order electrical spring constants. The device is fabricated with a standard silicon process and does not incorporate ferromagnetic materials. An analytical nonlinear model that correctly describes the device is also introduced.
del Corro, P. G., M. Imboden, D. J. Bishop, and H. Pastoriza. "Comb Drive Designs With Minimized Levitation." Journal of Microelectromechanical Systems 25, no. 6 (2016): 1025–1032.
Abstract: This paper presents two capacitive comb drive
designs for electrostatic actuation of MEMS with the aim to
eliminate the levitation effect often observed in such systems.
By placing a shield over the comb drive fingers, it is possible
to balance the electric field and suppress vertical forces while
maintaining the desired lateral motion. By optimizing the comb
geometry, we demonstrate that our approach is able to reduce the
levitation by an order of magnitude and unwanted coupling of
motion from out-of-plane to in-plane by a factor of 7 compared
with standard comb architectures fabricated using PolyMUMPs
technology, without the need of alternating comb finger polarities
or additional control electrodes. Levitation was reduced to
160 nm, for 3.6-Âµm lateral displacement at a driving voltage
of 80 V.