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N. Haberkorn, S. Bengio, H. Troiani, S. Suárez, P. D. Pérez, M. Sirena, J. Guimpel. Synthesis of nanocrystalline delta-MoN by thermal annealing of amorphous thins films grown on (100) Si by reactive DC sputtering at room temperature 2018 Thin Solid Films 660 242-246 details   doi
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