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| Author | Title | Year | Publication | Volume | Pages |
|---|---|---|---|---|---|
| del Corro, P.G.; Imboden, M.; Pérez, D.J.; Bishop, D.J.; Pastoriza, H. | Single ended capacitive self-sensing system for comb drives driven XY nanopositioners | 2018 | Sensors and Actuators A: Physical | 271 | 409-417 |