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Author (up) Title Year Publication Volume Pages
del Corro, P. G.; Imboden, M.; Bishop, D. J.; Pastoriza, H. Comb Drive Designs With Minimized Levitation 2016 Journal of Microelectromechanical Systems 25 1025-1032
del Corro, P.G.; Imboden, M.; Pérez, D.J.; Bishop, D.J.; Pastoriza, H. Single ended capacitive self-sensing system for comb drives driven XY nanopositioners 2018 Sensors and Actuators A: Physical 271 409-417